Electronic and Semiconductor gases are specialised for microelectronic manufacturing or semiconductor processing applications such as thin film deposition – including both chemical vapour deposition (CVD) and physical vapour deposition (PVD) – etching, RTP, packaging, or soldering.
Electronic and Semiconductor gases include pure gases and gas mixtures configured for specific purposes, including crystal growth, wafer fabrication, oxidation, thermal diffusion, and ion implantation.
Electronic and Semiconductor gases for semiconductor manufacturing include (there are many more):
|Ammonia (NH3)||Silane (SiCl4)|
|Sulfur Hexaflouride (SF6)||Nitrogen Trifluoride (NF3)|
|Nitrous Oxide (N2O)||Nitric Oxide (NO)|
See also our reference list under “Corrosive Gases”
Ne, H2 , Ar/O2 , N2 , CH4 , CO , CO2 , N2O, Kr, Xe, Hydrocarbons
Levels of Detection to parts per billion (ppb) are reached using an AGC Instruments Gas Chromatograph.
Select from the NovaCHROM Gas Chromatographs where we use only the best quality fittings to ensure a perfect leak tight, quality build to ensure excellent detection levels each time.
For more information on how AGC Instruments can assist you with Electronic Gas Analysis please contact us directly.